Kusebenza ku-Passat Fuel Calming Pressure Sensor 06E906051K

1. Indlela yokwenza inzwa yokucindezela, ehlanganisa:

Ukuhlinzeka nge-semiconductor substrate, lapho ungqimba lokuqala lwe-dielectric areBEctric, ungqimba lwe-dielectric wokuqala kanye nongqimba lwesibili lwe-dielectric y dielectric lusungulwa ku-semicenductor substrate.

Ipuleti le-elektrode eliphansi ku-interlayer distepric aphansi, i-electrode yokuqala etholakala engxenyeni efanayo njengepuleti elektrode eliphansi futhi lihlukaniswe ngaphandle.

Ukuxhuma izingqimba;

Akha ungqimba lomhlatshelo ngaphezulu kwepuleti eliphansi le-polar;

Kwakha ipuleti le-elektrode elingaphezulu engxenyeni yokuqala ye-dielectric ye-dielectric, ungqimba lokuqala lokuxhumana kanye nongqimba lomhlatshelo;

Ngemuva kokwenza ungqimba lomhlatshelo futhi ngaphambi kokukha ipuleti elingaphezulu, kungqimba lokuqala lokuxhumana

Ukwakha i-groove yokuxhumana, futhi ugcwalisa i-groove yokuxhuma ngepuleti elingaphezulu ukuze uxhumane ngogesi ngesendlalelo sokuqala sokuxhumana; Noma,

Ngemuva kokukha ipuleti le-elektrode elingaphezulu, kwakhiwa ama-grooves axhumeka epuletini eliphezulu le-elektrode kanye nesendlalelo sokuqala sokuxhumana, okuyinto

Kwakha ungqimba olusebenzayo oluxhuma ipuleti le-elektrode elingaphezulu kanye nesendlalelo sokuqala sokuxhumana ngokuxhumeka;

Ngemuva kokuxhuma ngogesi ipuleti elingaphezulu kanye nongqimba wokuqala wokuxhumana, ukususa ungqimba lomhlatshelo ukwakha umgodi.

2. Indlela yokwakha inzwa yokucindezela ngokuya ngesimangalo 1, lapho ungqimba lokuqala

Indlela yokwakha ungqimba lomhlatshelo ku-interlayer dielectric ungqimba liqukethe lezi zinyathelo ezilandelayo:

Ukubeka ungqimba lwezinto zomhlatshelo kungqimba lokuqala lokuphambanisa i-dielectric

Ukunwebeka isendlalelo somhlatshelo sokwenza ungqimba lomhlatshelo.

3. Indlela yokwakha inzwa yokucindezela ngokuya ngesimangalo 2, lapho i-Photolithography kanye nokuqoshwa kusetshenziswa.

Isendlalelo somhlatshelo siphethwe yinqubo etching.

4. Indlela yokwenza inzwa yokucindezela ngokuya ngesimangalo 3, lapho ungqimba lomhlatshelo

Izinto ezibonakalayo yikhabhoni efudumele noma i-terramonium.

I-5. Indlela yokwenza inzwa yokucindezela ngokuya ngesimangalo 4, lapho ungqimba lomhlatshelo

Izinto ezibonakalayo yikhabhoni efudumele;

Amagesi asetshenziswa esetshenziselwe inqubo yokufaka isendlalelo somhlatshelo afaka i-O2, CO, N2 ne-AR;

Amapharamitha enqubweni yokufaka i-wacking atremer ungqimba womhlatshelo yilezi: Uhla lwe-Flow of O2 ngu-18 SCCM ~ 22 SCCM, kanye ne-Flow Rate of 10%.

Izinga lokugeleza lisuka ku-90 SCCM liye ku-SCCM elingu-110 SCCM, izinga lokugeleza kwama-N2 kusuka ku-90 SCCM kuya ku-110 SCCM, kanye ne-AR.

Uhla ngu-90 SCCM ~ 110 SCCM, uhla lwezingcindezi lungu-90 MTOR ~ 110 MTOR, kanye namandla we-Bias

I-540w ~ 660w.