Isebenza ku-Passat fuel common rail pressure sensor 06E906051K

1. Indlela yokwenza inzwa yokucindezela, ehlanganisa:

Ukuhlinzeka nge-substrate ye-semiconductor, lapho ungqimba lokuqala lwe-dielectric lwe-interlayer, ungqimba lokuqala lwe-dielectric lwe-interlayer kanye nesesibili se-interlayer dielectric layer kwakheka ku-substrate ye-semiconductor.

Ipuleti le-electrode eliphansi kusendlalelo se-dielectric ye-interlayer yokuqala, i-electrode yokuqala ehlangene etholakala kusendlalelo esifanayo nepuleti le-electrode eliphansi futhi lihlukaniswe ngokuhlukana.

Ukuxhuma izingqimba;

Ukwakha isendlalelo somhlatshelo ngaphezu kwepuleti le-polar eliphansi;

Ukwakha ipuleti le-electrode eliphezulu kungqimba lokuqala lwe-dielectric ye-interlayer, ungqimba lokuqala lokuxhuma kanye nongqimba lomhlatshelo;

Ngemuva kokwenza isendlalelo somhlatshelo nangaphambi kokwenza ipuleti eliphezulu, kungqimba lokuqala lokuxhuma

Ukwakha i-groove yokuxhumana, nokugcwalisa i-groove yokuxhuma ngepuleti eliphezulu ukuze uxhumeke ngogesi nesendlalelo sokuqala sokuxhuma; Noma,

Ngemva kokwenza ipuleti le-electrode engenhla, kwakhiwa ama-grooves epuleti eliphezulu le-electrode kanye nongqimba lokuqala lokuxhumanisa, okuthi

Ukwakha isendlalelo se-conductive esixhuma ipuleti le-electrode eliphezulu kanye nosendlalelo sokuqala sokuxhuma endaweni yokuxhuma;

Ngemva kokuxhuma ngogesi ipuleti elingenhla kanye nongqimba lokuqala lokuxhuma, kususwa ungqimba lomhlatshelo ukuze kwakhe umgodi.

2. Indlela yokwenza inzwa yokucindezela ngokusho kwesimangalo esingu-1, lapho kusendlalelo sokuqala

Indlela yokwenza isendlalelo somhlatshelo kungqimba lwe-dielectric ye-interlayer ihlanganisa lezi zinyathelo ezilandelayo:

Ukufaka isendlalelo sezinto zomhlatshelo kungqimba lokuqala lwe-dielectric interlayer;

Ukwenza iphethini isendlalelo sezinto zomhlatshelo ukuze kwakhiwe isendlalelo somhlatshelo.

3. Indlela yokwenza inzwa yokucindezela ngokusho kwesimangalo 2, lapho kusetshenziswa i-photolithography nokuqoshwa.

Isendlalelo sezinto zomhlatshelo senziwa iphethini ngenqubo yokuqopha.

4. Indlela yokwenza inzwa yokucindezela ngokusho kwesimangalo esingu-3, ​​lapho ungqimba lomhlatshelo

Impahla i-amorphous carbon noma i-germanium.

5. Indlela yokwenza inzwa yokucindezela ngokusho kwesimangalo esingu-4, lapho ungqimba lomhlatshelo

Impahla i-amorphous carbon;

Amagesi e-etching asetshenziswa ohlelweni lokunamathisela ungqimba lwezinto zomhlatshelo ahlanganisa i-O2, i-CO, i-N2 ne-Ar;

Imingcele yenqubo yokunamathisela isendlalelo sezinto zomhlatshelo yilezi: ububanzi bokugeleza kwe-O2 yi-18 SCCM ~ 22 SCCM, futhi izinga lokugeleza kwe-CO ngu-10%.

Izinga lokugeleza lisukela ku-90 SCCM kuya ku-110 SCCM, izinga lokugeleza kwe-N2 lisukela ku-90 SCCM kuya ku-110 SCCM, kanye nezinga lokugeleza lika-Ar.

Ububanzi bungu-90 SCCM ~ 110 SCCM, ububanzi bengcindezi bungu-90 mtor ~ 110 mtor, futhi amandla okuchema

540w ~ 660w.