Isakhiwo Senzwa ye-Piezoresistive

Kule nzwa, i-resistor strip ihlanganiswe ku-monocrystalline silicon diaphragm ngenqubo yokuhlanganisa ukwenza i-silicon piezoresistive chip, futhi i-periphery yale chip ihlanganiswe ngokuqinile kugobolondo, futhi i-electrode lead ikhishwe. Inzwa yokucindezela kwe-piezoresistive, eyaziwa nangokuthi inzwa yengcindezi yesimo esiqinile, ihlukile kugeji yokulinganisa okunamathelayo, edinga ukuzwa amandla angaphandle ngokungaqondile ngezinto ezizwelayo ezinwebekayo, kodwa izwa ngokuqondile ingcindezi elinganiselwe nge-silicon diaphragm.

Olunye uhlangothi lwe-silicon diaphragm luwumgodi womfutho ophezulu oxhumana nengcindezi elinganisiwe, kanti olunye uhlangothi luwumgodi wokucindezela okuphansi okuxhumana nomoya. Ngokuvamile, i-silicon diaphragm iklanywe njengendilinga ene-periphery engaguquki, futhi isilinganiso sobubanzi kuya ku-20 ~ 60. Imichilo yokumelana nokungcola kwe-P emine isakazwa endaweni ku-silicon diaphragm eyindilinga futhi ixhunywe ebhulohweni eligcwele, ezimbili zazo. zisendaweni yengcindezi ecindezelayo kanti ezinye ezimbili zisendaweni yokucindezeleka okuqinile, ezilinganayo maqondana nendawo ephakathi ye-diaphragm.

Ngaphezu kwalokho, kukhona nesikwele se-silicon diaphragm kanye nenzwa yekholomu ye-silicon. Inzwa ye-silicon cylindrical nayo yenziwe ngemichilo ephikisayo ngokusakazwa ohlangothini oluthile lwendiza yekristalu yesilinda se-silicon, futhi imichilo emibili eqinile yokumelana nengcindezi kanye nemichilo emibili ecindezelayo evikela ingcindezi yenza ibhuloho eligcwele.

Inzwa ye-piezoresistive iyithuluzi elenziwe ngokumelana nokusabalalisa ku-substrate yezinto ze-semiconductor ngokusho komphumela we-piezoresistive we-semiconductor material. I-substrate yayo ingasetshenziswa ngokuqondile njengenzwa yokulinganisa, futhi ukumelana nokusabalalisa kuxhunywe ku-substrate ngendlela yebhuloho.

Uma i-substrate ikhutshazwa amandla angaphandle, amanani okumelana azoshintsha futhi ibhuloho lizokhiqiza okukhiphayo okuhambisanayo okungalingani. Ama-substrates (noma ama-diaphragms) asetshenziswa njengezinzwa ze-piezoresistive ikakhulukazi ama-silicon wafers nama-germanium wafers. Izinzwa ze-silicon piezoresistive ezenziwe ngezicwecwana ze-silicon njengezisetshenziswa ezibucayi zidonse ukunakwa okwengeziwe, ikakhulukazi izinzwa ze-solid state piezoresistive zokulinganisa ingcindezi nesivinini yizona ezisetshenziswa kakhulu.