Ukwakheka kwe-PieZoresurive Sensor

Kulesi sensor, umucu wokuphikiswa uhlanganiswe kwi-monocrystalline silicon diaphragm ngenqubo yokuhlanganisa ukuze wenze i-silicon piezoresoresive chip, futhi i-periphery yale chip ifakwe kahle egobolondweni, bese kuthi ama-electrode aholwa ngaphandle. I-Piezoresoresistive Pressure Sensor, eyaziwa nangokuthi inzwa yokucindezela ye-SOLID-State, ihlukile ku-Adhesive Grain Gauge, okudinga ukuzwa amandla angaphandle ngokungaqondile ngokusebenzisa izinto ezibucayi, kepha zizwa ngqo ingcindezi elinganiselwe nge-silicon diaphragm.

Uhlangothi olulodwa lwe-silicon diaphragm yithambo eliphakeme lokuxhumana nengcindezi elilinganisiwe, futhi ngakolunye uhlangothi kukhona umgexo wengcindezi ephansi exhumana nomkhathi. Ngokuvamile, i-silicon diaphragm yakhelwe njengombuthano onobubanzi obuhleliwe, futhi isilinganiso sobubanzi obungaphezulu kwe-20 ~ 60. Imichilo yokulwa nokungcola okugcwele kanye nezinye ezimbili zisendaweni yokucindezela, okuhambisana nesizinda se-diaphragm.

Ngaphezu kwalokho, kukhona futhi nesikwele sesikwele se-silicon diaphragm kanye sensor yekholomu ye-silicon. I-Silicon Cylindrical Sensor nayo yenziwa ngemichilo yokumelana ngokuzithoba kwendiza ethile yendiza ye-crystal yesilinda se-silicon, kanye nemichilo emibili yokumelana nengcindezelo ecindezelayo yakha ibhuloho eligcwele.

I-PieZoresures Sensor yithuluzi elenziwe ngokumelana nokuvikelwa kwe-substrate ye-semiconductor ngokwezinto ze-semizeristive ze-semiconductor. I-substrate yayo ingasetshenziswa ngokuqondile njengenzwa yokulinganisa, futhi ukumelana nokungafani kuxhumeke endaweni engezansi ngesimo sebhuloho.

Lapho i-substrate ichithwa ngamandla angaphandle, amanani okumelana azoshintsha bese ibhuloho lizokhiqiza okukhona okufanayo okungalinganiseli. Ama-substrates (noma i-diaphragms) esetshenziswa njengezinzwa ze-piezoresustive ikakhulukazi ama-silicon wafers nama-wafers e-germanium. Izinzwa ze-Silicon Piezoresurive zenziwe nge-Silicon Wafers njengoba izinto ezibucayi zidonsele ukunakwa okwengeziwe, ikakhulukazi izinzwa ze-piezoresistive eziqinile zokulinganisa ingcindezi kanye nesivinini kusetshenziswa kakhulu.