Ifanele inzwa yokucindezela kawoyela ye-Hitachi KM11 EX200-2-3-5

Ubuchwepheshe bengcindezi obune benzwa yokucindezela

1. Inamandla

izinzwa ze-capacitive pressure ngokuvamile zithandwa inombolo enkulu yezinhlelo zokusebenza ze-OEM zobungcweti. Ukuthola izinguquko zamandla phakathi kwezindawo ezimbili kuvumela lezi zinzwa ukuthi zizwe ingcindezi ephansi kakhulu kanye namazinga e-vacuum. Ekucushweni kwethu kwenzwa evamile, indlu ehlangene iqukethe izindawo ezimbili zensimbi eziqhelelene eduze, ezihambisanayo nezihlukaniswe ngogesi, enye yazo okuyi-diaphragm ekwazi ukugoba kancane ngaphansi kwengcindezi. Lezi zindawo ezigxilwe ngokuqinile (noma amapuleti) afakwe ukuze ukugoba komhlangano kuguqule igebe phakathi kwabo (empeleni kwakha i-capacitor eguquguqukayo). Ushintsho oluwumphumela lutholwa isekethe yesiqhathanisi somugqa ebucayi ene-(noma i-ASIC), ekhulisa futhi ikhiphe isignali yezinga eliphezulu.

2.CVD uhlobo

I-chemical vapor deposition (noma "i-CVD") indlela yokukhiqiza ibhondi ungqimba lwe-polysilicon ku-diaphragm yensimbi engagqwali ezingeni lamangqamuzana, ngaleyo ndlela ikhiqize inzwa esebenza kahle kakhulu yesikhathi eside sokukhukhuleka. Izindlela zokukhiqiza ze-batch ezijwayelekile zokucubungula i-semiconductor zisetshenziselwa ukwakha amabhuloho we-polysilicon strain gauge asebenza kahle kakhulu ngentengo enengqondo kakhulu. Isakhiwo se-CVD sinokusebenza okuhle kakhulu kwezindleko futhi iyinzwa ethandwa kakhulu ezinhlelweni ze-OEM.

3. Uhlobo lwefilimu oluqhumayo

Ukufakwa kwefilimu e-sputtering (noma "ifilimu") kungakha inzwa enomugqa ohlangene ophelele, i-hysteresis nokuphindaphinda. Ukunemba kungase kufinyelele ku-0.08% wesilinganiso esigcwele, kuyilapho ukukhukhuleka kwesikhathi eside kuphansi njengo-0.06% wesilinganiso esigcwele minyaka yonke. Ukusebenza okungajwayelekile kwezinsimbi ezibalulekile-inzwa yethu yefilimu ezacile echithekile iyigugu embonini ezwa ingcindezi.

4.MMS uhlobo

Lezi zinzwa zisebenzisa i-micro-machined silicon (MMS) diaphragm ukuze zithole izinguquko zengcindezi. I-silicon diaphragm ihlukanisiwe kokuphakathi nge-316SS egcwele uwoyela, futhi isabela ngochungechunge ngokucindezela koketshezi lwenqubo. Inzwa ye-MMS isebenzisa ubuchwepheshe bokukhiqiza obujwayelekile be-semiconductor, obungakwazi ukufinyelela ukumelana nogesi ophezulu, ukuhleleka okuhle, ukusebenza okuhle kakhulu kokushaqeka okushisayo nokuzinza kuphakheji yezinzwa ezihlangene.